Features & Specifications

Radian 7 VPD-ICPMS


VPD-DC

,

online monitoring

, Combine Tools to Control and Cross-verify FAB Metal Contamination, icpms analysis, metal contamination, online monitoring, vpd-dc-icp-ms, semiconductor wafer, semiconductor wafer analysis, Vapor Phase Decomposition, online monitoring, ultrafast scanner, VPD ICP-MS analysis Vapor Phase Decomposition
  • EFEM - 1 Robot, ULPA Filter and FFU
    • 3 Load ports available
  • Parallel All-in-one Process Modules
  • Integrated Single Quad or Triple Quad ICPMS
  • Highest Productivity
  • Ultra-low 105 - 108 atoms/cm2 detection capability
  • SEMI Certified

Radian 3 VPD-ICPMS


  • EFEM - 1 Robot, ULPA Filter and FFU
    • 2 Load ports available
  • All-in-one Process Module
  • Integrated Single Quad or Triple Quad ICPMS
  • Compact High Productivity
  • Ultra-low 105 - 108 atoms/cm2 detection capability
  • SEMI Certified